Quick Answer
Calculate Rayleigh lithography resolution limit for minimum critical dimension
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Find Engineering Solutions →Result Interpretation
Rayleigh lithography resolution limit for minimum critical dimension calculator computes Minimum resolvable critical dimension in m using the defined engineering formula and the input values provided. Minimum resolvable critical dimension is expressed in m. No universal acceptance threshold is defined by this calculator.
Worked Example
Verified calculation
Given:
- Exposure wavelength = 1.93E-7
- Numerical aperture of projection lens = 0.85
- Process-dependent resolution factor = 0.25
Expected Result:
- Minimum resolvable critical dimension = 5.6764705882353E-8
Engineering Interpretation:
Under the given input conditions, the calculated result is: Minimum resolvable critical dimension = 5.6764705882353E-8 m.
The actual numerical result is computed by the Runtime engine using the persisted tool definition. The values shown here come from automatically validated test cases.
Formula / Method
minimum resolvable critical dimension = process-dependent resolution factor * exposure wavelength / numerical aperture of projection lensFormula family: formula_semiconductor_lithography_resolution_limit_cdmin_vs_wavelength_na_and_k1_calculator
Variables
| Symbol | Label | Role | Description |
|---|---|---|---|
| wavelength | Exposure wavelength | INPUT | Exposure wavelength |
| na | Numerical aperture of projection lens | INPUT | Numerical aperture of projection lens |
| k1 | Process-dependent resolution factor | INPUT | Process-dependent resolution factor |
| cdmin | Minimum resolvable critical dimension | OUTPUT | Minimum resolvable critical dimension |
Calculation Steps
- Enter the exposure wavelength in m.
- Enter the numerical aperture of projection lens in dimensionless.
- Enter the process-dependent resolution factor in dimensionless.
- Step 1: Compute minimum resolvable critical dimension.
- Read the minimum resolvable critical dimension (m) from the results.
Engineering Summary
Calculate Rayleigh lithography resolution limit for minimum critical dimension
Frequently Asked Questions
What does this calculator calculate?
The Rayleigh lithography resolution limit for minimum critical dimension calculator estimates Minimum resolvable critical dimension based on the input parameters you provide
Why is exposure wavelength important in this calculation?
exposure wavelength is directly proportional to minimum resolvable critical dimension. When you enter exposure wavelength in m, the calculator uses it in the engineering formula to compute the output
How should I interpret the result minimum resolvable critical dimension?
The calculator outputs minimum resolvable critical dimension in m. The result is computed directly from the input values using the defined engineering formula
What units should I use for the inputs?
Enter each value in the units shown next to the input field: Exposure wavelength (m), Numerical aperture of projection lens (dimensionless), Process-dependent resolution factor (dimensionless). Make sure all inputs use the specified units for consistent results
What assumptions does this calculator use?
This calculator uses automatically validated engineering formulas. Results are approximate and should be validated against site-specific conditions, applicable codes, and professional engineering judgment
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